Optical waveguide detection: photodetector array formed on the waveguide utilizing laser recrystallized silicon

Integrated detection of light propagating in an optical waveguide with a photodetector array fabricated directly on the waveguide surface is demonstrated. Laser recrystallization of polycrystalline silicon is utilized. Periodically spaced antireflection stripes are used to confine grain boundaries f...

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Bibliographic Details
Published in:Applied physics letters 1985-03, Vol.46 (5), p.498-500
Main Authors: WU, R. W, BOYD, J. T, TIMLIN, H. A, JACKSON, H. E, JANNING, J. L
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Miscellaneous
Optical and optoelectronic circuits
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Summary:Integrated detection of light propagating in an optical waveguide with a photodetector array fabricated directly on the waveguide surface is demonstrated. Laser recrystallization of polycrystalline silicon is utilized. Periodically spaced antireflection stripes are used to confine grain boundaries formed during laser recrystallization to the area under these stripes, with photodetector elements formed on single crystal grains between the stripes. Regions containing the grain boundaries are then removed by plasma etching. Lateral p-i-n photodiode elements formed by ion implantation are characterized by reverse leakage currents
ISSN:0003-6951
1077-3118
DOI:10.1063/1.95915