Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization

In order to overcome mode aliasing limitation in linear mode-localized sensors, we demonstrate in this Letter both theoretically and experimentally how to tune the electrostatic nonlinearity and exceed the ultimate sensitivity reachable in the linear regime. A mass sensor composed of two coupled mic...

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Bibliographic Details
Published in:Applied physics letters 2020-07, Vol.117 (3)
Main Authors: Rabenimanana, Toky, Walter, Vincent, Kacem, Najib, Le Moal, Patrice, Bourbon, Gilles, Lardiès, Joseph
Format: Article
Language:English
Subjects:
Aliasing
Applied physics
Ion beams
Localization
Mechanics
Perturbation
Physics
Sensitivity enhancement
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Summary:In order to overcome mode aliasing limitation in linear mode-localized sensors, we demonstrate in this Letter both theoretically and experimentally how to tune the electrostatic nonlinearity and exceed the ultimate sensitivity reachable in the linear regime. A mass sensor composed of two coupled micro-cantilevers with different lengths is considered and the results show that the sensitivity can be significantly enhanced up to 67 %. By performing experiments on the fabricated device and depositing the mass perturbation with a focused ion beam, the same phenomenon was observed. These promising results open the way toward ultrasensitive multimodal microsensors with functionalized nonlinearities.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0007446