Bending behaviors of flexible acoustic wave devices under non-uniform elasto-plastic deformation

Flexible acoustic wave devices (FAWDs) have been explored in various applications where bending is inevitable. However, theoretical investigations of bending behavior of FAWDs hitherto are mostly done in the linear deformation regime. Herein, we develop a multi-sublayer model based on a stiffness ma...

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Bibliographic Details
Published in:Applied physics letters 2021-03, Vol.118 (12)
Main Authors: Zhang, Qian, Wang, Yong, Li, Dongsheng, Yang, Xin, Xie, Jin, Fu, Yongqing
Format: Article
Language:English
Subjects:
Accuracy
Acoustics
Applied physics
Bending machines
Elastic bending
Frequency analysis
Lamb waves
Plastic deformation
Qualitative analysis
Sensitivity
Stiffness matrix
Strain
Surface acoustic waves
Zinc oxide
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Summary:Flexible acoustic wave devices (FAWDs) have been explored in various applications where bending is inevitable. However, theoretical investigations of bending behavior of FAWDs hitherto are mostly done in the linear deformation regime. Herein, we develop a multi-sublayer model based on a stiffness matrix method for analysis of frequency shifts of surface acoustic waves and Lamb waves under elasto-plastic deformations. Using this model, we calculate the frequency shifts for the cases of both an elastic bending and an elasto-plastic bending. Experimental frequency shifts of ZnO/Al flexible devices show good agreement with the theoretical results in the elastic bending tests (with a relative error of strain sensitivity 
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0043550