Al0.68Sc0.32N Lamb wave resonators with electromechanical coupling coefficients near 10.28

Aluminum scandium nitride (Al1−xScxN/AlScN) (x = 0.32) Lamb wave resonators (LWR) have been fabricated and tested to demonstrate electromechanical coupling coefficients (kt2) in excess of 10%. The resonators exhibited an average kt2 and unloaded quality factor (Qu) of 10.28% and 711, respectively, w...

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Bibliographic Details
Published in:Applied physics letters 2021-04, Vol.118 (17)
Main Authors: Esteves, Giovanni, Young, Travis R., Tang, Zichen, Yen, Sean, Bauer, Todd M., Henry, Michael D., Olsson, Roy H.
Format: Article
Language:English
Subjects:
Aluminum
Applied physics
Coupling coefficients
ENGINEERING
Lamb waves
Mathematical models
Motional resistance
Oscillators
Piezoelectricity
Q factors
Resonators
Scandium
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Summary:Aluminum scandium nitride (Al1−xScxN/AlScN) (x = 0.32) Lamb wave resonators (LWR) have been fabricated and tested to demonstrate electromechanical coupling coefficients (kt2) in excess of 10%. The resonators exhibited an average kt2 and unloaded quality factor (Qu) of 10.28% and 711, respectively, when calculated from the measured data. Applying the Butterworth Van-Dyke (BVD) model to the measured data enabled the extraction of the resonator's lumped element parameters to calculate the motional quality factor (Qm), which neglects the contributions of the electrical traces. For the best measured resonator response, results from the BVD model showed a Qm of 1184 and a resulting figure-of-merit (FOM = K2 · Qm) of 100. Comparing the response of similar AlScN and AlN resonators shows that the AlScN LWR has a significantly lower motional resistance (Rm), suggesting that AlScN has a strong potential for use in piezoelectric microelectromechanical oscillators.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0047647