Temperature and humidity sensor based on MEMS technology

This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the “bi-metallic” effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a...

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Bibliographic Details
Published in:AIP advances 2021-08, Vol.11 (8), p.085126-085126-8
Main Authors: Zhao, Dongyan, Wang, Yubo, Shao, Jin, Zhang, Peng, Chen, Yanning, Fu, Zhen, Wang, Shuaipeng, Zhao, Wenlong, Zhou, Zhimei, Yuan, Yuandong, Fu, Dengyuan, Zhu, Yinfang
Format: Article
Language:English
Subjects:
Humidity
Microelectromechanical systems
Numerical analysis
Parallel plates
Relative humidity
Response time
Sensor arrays
Sensors
Temperature sensors
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Summary:This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The temperature sensor working on the “bi-metallic” effect has the advantages of wide temperature range, high sensitivity, and fast detection. The humidity sensor has a polyimide parallel plate capacitive structure with the microporous array on the upper electrode designed for high sensitivity and fast response. Numerical analysis and COMSOL simulation showed that the temperature detection sensitivity is 0.2 mV/°C in the range of 193–393 K and humidity sensitivity is 0.405 pF/% relative humidity (RH) with the response time of 34 s in the humidity range of 0%–100% RH. The integrated temperature and humidity sensor has the advantages of small dimension, wide detection range, high precision, and fast response.
ISSN:2158-3226
2158-3226
DOI:10.1063/5.0053342