Investigation of trapping effects in Schottky lightly doped P-GaN gate stack under γ-ray irradiation

• Published in: Applied physics letters 2022-10, Vol.121 (14)
• Main Authors: Wang, Peng, Jiang, Yizhou, Gu, Yitian, Huang, Menglin, Huang, Wei, Chen, Shiyou, Xiao, Zhiqiang, Zou, Xinbo, Qiu, Yiwu, Zhou, Xinjie, Zhou, Jianjun, Zhang, David Wei
• Format: Article
• Language: English
• Subjects: Aluminum gallium nitrides; Applied physics; Electric potential; Gallium nitrides; High electron mobility transistors; Microscopy; Radiation; Radiation damage; Radiation dosage; Radiation tolerance; Semiconductor devices; Trapping; Voltage
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/5.0094090

In this Letter, trapping effects of a Schottky lightly Mg-doped p-GaN gate stack for low-power applications have been investigated, and further analysis focusing on AlGaN/GaN interface traps under γ-ray irradiation has been carried out. A negligible shift in the flatband voltage with γ-ray irradiation dose up to 800 krad indicates the superior radiation tolerance of the p-GaN gate structure. The difference between capacitance dispersion at the measurement frequency below and above 500 kHz is observed, which is attributed to trapping effects in different locations with varying gate voltage. Moreover, the frequency-dependent conductance method is put forward to assess the effects of different doses of γ-ray irradiation on the AlGaN/GaN interface traps. Based on that method, aside from the shallow trap states [the trap activation energy (ET) is about 0.334–0.338 eV] previously found in the traditional normally on high electron mobility transistor (HEMT), another type of deeper trap states at the AlGaN/GaN interface (ET is about 0.467–0.485 eV) is detected. It is observed that the ET of shallow trap states distributes at a deeper and broader range as the irradiation dose increases. Additionally, the trap density decreased after 600 krad doses irradiation but increased after 800 krad doses irradiation for both deep and shallow ET. Transmission electron microscopy and atomic force microscopy are used to demonstrate the smooth AlGaN/GaN interface morphology, which will not be greatly damaged after 800 krad doses of γ-ray irradiation. This work can provide a further understanding of radiation tolerance and trapping effects of p-GaN gate HEMTs for low-voltage applications.