Microwave-induced thermoacoustic imaging with a multi-cell AlScN piezoelectric micromachined ultrasonic transducer

This Letter reports on microwave-induced thermoacoustic imaging utilizing a multi-cell aluminum scandium nitride (AlScN) piezoelectric micromachined ultrasonic transducer (PMUT). Thermoacoustic signals are induced by microwave pulses and then detected by the ultrasonic transducer. It carries biologi...

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Bibliographic Details
Published in:Applied physics letters 2023-03, Vol.122 (13)
Main Authors: Wang, Yiwei, Zhang, Lejia, Wang, Baosheng, Cai, Junxiang, Gu, Yuandong Alex, Lou, Liang, Wang, Xiong, Wu, Tao
Format: Article
Language:English
Subjects:
Aluminum
Applied physics
Diagnosis
Imaging
Micromachining
Piezoelectricity
Scandium
Thermoacoustics
Transducers
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Summary:This Letter reports on microwave-induced thermoacoustic imaging utilizing a multi-cell aluminum scandium nitride (AlScN) piezoelectric micromachined ultrasonic transducer (PMUT). Thermoacoustic signals are induced by microwave pulses and then detected by the ultrasonic transducer. It carries biological information, thus enabling noninvasive clinical diagnosis. Our AlScN PMUT device was characterized and experimented to show that it could significantly improve the imaging of the biological sample, decreasing the mean square error by up to 72%, which benefits from a 2.96 times larger detection angle of thermoacoustic signals compared to commercial ultrasonic transducers. The miniaturized and high-performance PMUT devices have the potential to be applied to clinical or personal diagnosis and monitoring equipment.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0140069