Soft deposition of TCOs by pulsed laser for high-quality ultra-thin poly-Si passivating contacts

In this work, the applicability of pulsed laser deposition (PLD) of transparent conductive oxides (TCOs) on high-quality ultra-thin poly-Si based passivating contacts is explored. Parasitic absorption caused by poly-Si layers can be minimized by reducing the poly-Si layer thickness. However, TCO dep...

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Bibliographic Details
Published in:Journal of applied physics 2023-10, Vol.134 (15)
Main Authors: Ah Sen, Mike Tang Soo Kiong, Mewe, Agnes, Melskens, Jimmy, Bolding, Jons, van de Poll, Mike, Weeber, Arthur
Format: Article
Language:English
Subjects:
Contact pressure
Damage
Electric contacts
Electrical properties
Heat treatment
High temperature
Indium tin oxides
Passivity
Polysilicon
Pulsed laser deposition
Pulsed lasers
Thermal stability
Thickness
Thin films
Tin oxides
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Summary:In this work, the applicability of pulsed laser deposition (PLD) of transparent conductive oxides (TCOs) on high-quality ultra-thin poly-Si based passivating contacts is explored. Parasitic absorption caused by poly-Si layers can be minimized by reducing the poly-Si layer thickness. However, TCO deposition on poly-Si contacts, commonly by sputtering, results in severe deposition-induced damage and further aggravates the surface passivation for thinner poly-Si layers (
ISSN:0021-8979
1089-7550
DOI:10.1063/5.0158681