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Evaluation of the permeability of ultrathin parylene AF4 films to determine minimum closed thickness for nanoscale packaging
This study investigated the permeability of parylene AF4 films of varying thickness to determine the minimum closed thickness for nanoscale packaging coatings. In particular, films with thicknesses of 15, 20, and 25 nm were deposited using 1 g of dimer and by adjusting the coating machine’s chamber...
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Published in: | AIP advances 2024-10, Vol.14 (10), p.105324-105324-10 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | This study investigated the permeability of parylene AF4 films of varying thickness to determine the minimum closed thickness for nanoscale packaging coatings. In particular, films with thicknesses of 15, 20, and 25 nm were deposited using 1 g of dimer and by adjusting the coating machine’s chamber height. Closeness analysis and electrochemical impedance spectroscopy (EIS) were employed to determine the minimum closed thickness. The closeness analysis results revealed a resistance of 1.35 MΩ (below the 20 MΩ threshold) for the 15 nm film, indicating a nonclosed film; conversely, the 20 and 25 nm films exhibited resistance values of 66.1 and 111.7 MΩ (above the threshold), respectively, indicating closed films. The EIS results indicated that the failure soaking times of the 15, 20, and 25 nm films were approximately |
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ISSN: | 2158-3226 2158-3226 |
DOI: | 10.1063/5.0218993 |