Effect of roughness, deterministic and random errors in film thickness on the reflecting properties of aperiodic mirrors for the EUV range

By the example of three aperiodic multilayer Mo/Si mirrors (AMM) for the wavelength ranges , and we have studied numerically the effect of the linearly determinisctic and random fluctuations of the film thickness and the interlayer roughness on the spectral dependences of the reflection coefficient....

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Bibliographic Details
Published in:Quantum electronics (Woodbury, N.Y.) N.Y.), 2016-01, Vol.46 (5), p.406-413
Main Authors: Gaikovich, P.K., Polkovnikov, V.N., Salashchenko, N.N., Chkhalo, N.I., Schäfers, F., Sokolov, A.
Format: Article
Language:English
Subjects:
aperiodic multilayer mirrors
COMPUTERIZED SIMULATION
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
ERRORS
EXTREME ULTRAVIOLET RADIATION
Film thickness
Fluctuation
FLUCTUATIONS
LAYERS
MIRRORS
MOLYBDENUM
Reconstruction
REFLECTION
Reflection coefficient
ROUGHNESS
SILICON
THICKNESS
THIN FILMS
Variance
WAVELENGTHS
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Summary:By the example of three aperiodic multilayer Mo/Si mirrors (AMM) for the wavelength ranges , and we have studied numerically the effect of the linearly determinisctic and random fluctuations of the film thickness and the interlayer roughness on the spectral dependences of the reflection coefficient. The simulation results are used to solve the inverse problem of reconstructing the interlayer roughness and the thickness of individual films from the measured dependences of the extreme UV radiation reflection coefficients. It is shown that the 'asymmetry' of the boundaries affects the magnitude and slope of the reflection coefficient plateau. Random fluctuations of the film thickness with the variance of 1 % - 2 % weakly influence the reflection characteristics of AMMs and allow reliable reconstruction of the thickness of individual films. The fluctuations with the variance 8 % - 10 % allow the estimation of individual thicknesses, but the reflection curve in this case strongly differs from the desirable one. Larger fluctuations do not allow the reconstruction of the AMM structure. The basic criteria for high-quality AMM synthesis are formulated.
ISSN:1063-7818
1468-4799
DOI:10.1070/QEL16037