Temperature sensor based on a polymer diffraction grating with silver nanoparticles

• Published in: Quantum electronics (Woodbury, N.Y.) N.Y.), 2018-01, Vol.48 (1), p.82-86
• Main Authors: Nuzhdin, V.I., Valeev, V.F., Galyautdinov, M.F., Osin, Yu.N., Stepanov, A.L.
• Format: Article
• Language: English
• Subjects: BEAM CURRENTS; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CURRENT DENSITY; DIFFRACTION; DIFFRACTION GRATINGS; Gratings (spectra); GRIDS; HOLES; ION BEAMS; ION IMPLANTATION; IRRADIATION; laser thermometry; LASERS; MICROSTRUCTURE; NANOPARTICLES; NANOSCIENCE AND NANOTECHNOLOGY; optical diffraction; optical polymer materials; PERIODICITY; plasmon absorption; PMMA; Polymers; Polymethyl methacrylate; Radiation dosage; RADIATION DOSES; SENSORS; SILVER; SILVER IONS; silver nanoparticles; SUBSTRATES; temperature sensor; Temperature sensors; TESTING
• ISSN: 1063-7818; 1468-4799
• DOI: 10.1070/QEL16499

The method is suggested for producing an optical temperature noncontact sensor on a polymer polymethylmethacrylate (PMMA) substrate with a diffraction optical element formed by implanting low-energy high-dose silver ions through a surface mask. Ion implantation is performed at an energy of 30 keV, a radiation dose of 5.0 × 1016 ion cm−2 and an ion beam current density of 2 μA cm−2 through a surface metal mask having the form of grid with square periodical holes (cells) of size 25 μm. In the course of implantation, silver nanoparticles are produced in periodical unmasked domains of irradiated PMMA. Operation of the temperature sensor on diffraction microstructures made of polymer with silver nanoparticles is demonstrated in the range from 20 °C to 95 °C by testing it with a probe radiation of a He - Ne laser.