Optimization of white light interferometry on rough surfaces based on error analysis

White light interferometry can be used to measure the shape of rough surfaces. At rough surfaces, the measuring uncertainty in principle cannot be better than the surface roughness, which is commonly in the range of 1 micron. Hence, the requirements for the hard- and software components of the instr...

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Bibliographic Details
Published in:Optik (Stuttgart) 2004, Vol.115 (8), p.351-357
Main Authors: Saraç, Zehra, Groß, Reinhard, Richter, Claus, Wiesner, Bernhard, Häusler, Gerd
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Electron, ion, and scanning probe microscopy
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interface structure and roughness
Interferometers
measuring uncertainty
Optical instruments, equipment and techniques
Physics
Solid surfaces and solid-solid interfaces
Structure of solids and liquids
crystallography
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
White light interferometry
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Summary:White light interferometry can be used to measure the shape of rough surfaces. At rough surfaces, the measuring uncertainty in principle cannot be better than the surface roughness, which is commonly in the range of 1 micron. Hence, the requirements for the hard- and software components of the instrument are not as high as for interferometry in the nanometer regime. An analysis of the dominant error sources allows the design of an “optimal” sensor with a measuring uncertainty as small as physically possible, with components as good as necessary and as simple as possible.
ISSN:0030-4026
1618-1336
DOI:10.1078/0030-4026-00369