Ferroelectric PZT Films Without Fatigue Degradation Prepared by MOD Process

Results of studies of the effect of the buffer layer 1.3PbO 0.5ZrO 2 0.5TiO 2 (conditional composition is Pb 1.3 (Zr 0.5 Ti 0.5 )O 3 ) on the properties of Pb(Zr 0.5 Ti 0.5 )O 3 films on Ti and Pt substrates are considered. The films are obtained by metal organic deposition method (MOD). Films depos...

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Bibliographic Details
Published in:Ferroelectrics 2004-01, Vol.298 (1), p.135-140
Main Authors: Ishchuk, V. M., Cherginets, V. L., Demirskaya, O. V., Aslanov, A. V., Klitsova, Zh. I., Teplitskaya, T. S., Sobolev, V. L.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
fatigue
Ferroelectric films
Ferroelectricity and antiferroelectricity
Physics
PZT
switching cycles
Switching phenomena
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Summary:Results of studies of the effect of the buffer layer 1.3PbO 0.5ZrO 2 0.5TiO 2 (conditional composition is Pb 1.3 (Zr 0.5 Ti 0.5 )O 3 ) on the properties of Pb(Zr 0.5 Ti 0.5 )O 3 films on Ti and Pt substrates are considered. The films are obtained by metal organic deposition method (MOD). Films deposited on Pt substrate (with the buffer layer or without it) do not show fatigue up to N = 10 9 (where N is number of switching cycles) on P r (N) and E c (N) dependences. For films deposited on Ti substrates with the intermediate buffer layer P r (N) dependences demonstrate a basically new feature: after ∼10 8 switching cycles the remanent polarization increases. The increase of P r is 50% at N = 10 10 , the increase of coercive field is small.
ISSN:0015-0193
1563-5112
DOI:10.1080/00150190490423354