A micromechanical analogue mixer with dynamic displacement amplification

A new micromechanical device is proposed which is capable of modulation, demodulation and filtering operations. The device uses a patented 3-mass coupled micromechanical resonator which dynamically amplifies the displacement within a frequency range of interest. Modulation can be obtained by excitin...

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Bibliographic Details
Published in:International journal of electronics 2018-06, Vol.105 (6), p.969-981
Main Author: Erismis, M. A.
Format: Article
Language:English
Subjects:
Amplification
Demodulation
electro-mechanical co-simulations
filters
Filtration
Integrated circuits
MEMS
mixlers
Modulation
Resonators
Simulation
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Summary:A new micromechanical device is proposed which is capable of modulation, demodulation and filtering operations. The device uses a patented 3-mass coupled micromechanical resonator which dynamically amplifies the displacement within a frequency range of interest. Modulation can be obtained by exciting different masses of the resonator with the data and the carrier signals. Demodulation can be obtained similarly by exciting the actuator with the input and carrier signals at the same time. With the help of dynamic motion amplification, filtering and signal amplification can be achieved simultaneously. A generic design approach is introduced which can be applied from kHz to MHz regime frequencies of interest. A sample mixer design for an silicon on insulator-based process is provided. A SPICE (Simulation Program with Integrated Circuit Emphasis)-based electro-mechanical co-simulation platform is also developed and the proposed mixer is simulated.
ISSN:0020-7217
1362-3060
DOI:10.1080/00207217.2017.1423397