Growth-etching competitive mechanism governing the structure and chemical composition of plasma-deposited silicon-based materials

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Bibliographic Details
Published in:Philosophical magazine. B, Physics of condensed matter. Structural, electronic, optical, and magnetic properties. Physics of condensed matter. Structural, electronic, optical, and magnetic properties., 2000-04, Vol.80 (4), p.487-496
Main Author: Ambrosone, G. Bruno, P. Capezzuto, G.
Format: Article
Language:English
Online Access:Get full text
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ISSN:1364-2812
1463-6417
DOI:10.1080/014186300255131