Ferroelectric and Piezoelectric Properties of Pb(Zr,Ti)O 3 Thin Films Integrated on SOI Wafers

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Bibliographic Details
Published in:Integrated ferroelectrics 2005-01, Vol.69 (1), p.223-229
Main Authors: Wang, Y., Cheng, Y. L., Liu, W. L., Lam, T. Y., Song, Z. T., Feng, S. L., Chan, H. L. W., Choy, C. L.
Format: Article
Language:English
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ISSN:1058-4587
1607-8489
DOI:10.1080/10584580590898730