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Analysis of C-V and I-V data of BST thin films
Thin films of Ba 0.7 Sr 0.3 TiO 3 have been fabricated using Enhanced Metal Organic Decomposition (EMOD) process on Si/SiO 2 /Ti/Pt substrates. The C-V characteristics of these films reveal a relation of log(1/C m ) ∝ V A where C m is the measured capacitance at a frequency of 10 KHz and V A is the...
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Published in: | Integrated ferroelectrics 1997-01, Vol.14 (1-4), p.133-140 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Thin films of Ba
0.7
Sr
0.3
TiO
3
have been fabricated using Enhanced Metal Organic Decomposition (EMOD) process on Si/SiO
2
/Ti/Pt substrates. The C-V characteristics of these films reveal a relation of log(1/C
m
) ∝ V
A
where C
m
is the measured capacitance at a frequency of 10 KHz and V
A
is the applied voltage. This voltage variable capacitance is characterized by an inverse quadratic distance proportinal charge distribution at the boundary layer between metal and paraelectric material. Above a threshold voltage of 3-5 V the leakage current density exhibits a modified Schottky emission, which states that log (J
L
) ∝ V
1/4
. Below this threshold voltage, the origin of the leakage current which is operative in normal circuit applications has been discussed and identified from its temperature variation. |
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ISSN: | 1058-4587 1607-8489 |
DOI: | 10.1080/10584589708019985 |