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The integration of Ba 0.5 Sr 0.5 TiO 3 with silicon by the use of metallic buffers
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Published in: | Integrated ferroelectrics 1998-09, Vol.21 (1-4), p.167-172 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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ISSN: | 1058-4587 1607-8489 |
DOI: | 10.1080/10584589808202060 |