Sensitivity analysis of gas-phase chemistry leading to diamond deposition

Sensitivity analysis of gas-phase chemistry is used for improving the diamond growth model. Performed consideration shows that the more careful choice of a set of chemical reactions, both gas-phase and surface, and of their parameters is required. It is concluded that the preliminary analysis of the...

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Bibliographic Details
Published in:Fullerenes, nanotubes, and carbon nanostructures nanotubes, and carbon nanostructures, 2020-04, Vol.28 (4), p.277-280
Main Authors: Gorbachev, Yuriy E., Leshchev, Dmitrii V.
Format: Article
Language:English
Subjects:
CVD
Diamond
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Summary:Sensitivity analysis of gas-phase chemistry is used for improving the diamond growth model. Performed consideration shows that the more careful choice of a set of chemical reactions, both gas-phase and surface, and of their parameters is required. It is concluded that the preliminary analysis of the sensitivity of the system to key parameters is welcome.
ISSN:1536-383X
1536-4046
DOI:10.1080/1536383X.2019.1697687