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Influence of co-sputtering AlB 2 to TaB 2 on stoichiometry of non-reactively sputtered boride thin films
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Published in: | Materials research letters 2024-08, Vol.12 (8), p.561-570 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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ISSN: | 2166-3831 2166-3831 |
DOI: | 10.1080/21663831.2024.2357700 |