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Influence of co-sputtering AlB 2 to TaB 2 on stoichiometry of non-reactively sputtered boride thin films
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Published in: | Materials research letters 2024-08, Vol.12 (8), p.561-570 |
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Language: | English |
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container_end_page | 570 |
container_issue | 8 |
container_start_page | 561 |
container_title | Materials research letters |
container_volume | 12 |
creator | Hu, Chun Lin, Shuyao Podsednik, M. Mráz, Stanislav Wojcik, T. Limbeck, A. Koutná, Nikola Mayrhofer, Paul H. |
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doi_str_mv | 10.1080/21663831.2024.2357700 |
format | article |
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title | Influence of co-sputtering AlB 2 to TaB 2 on stoichiometry of non-reactively sputtered boride thin films |
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