Quantitative boron determination in doped SiO 2 films by SIMS

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1983-01, Vol.16 (1), p.59-67
Main Authors: Hoffmann, G, Romanova, G F, Nemeth-Sallay, M, Marchenko, R J, Didenko, P J
Format: Article
Language:English
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/16/1/010