The applicability of implanted -sources to thickness and stoichiometry measurements of thin films

Saved in:
Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 1997-01, Vol.30 (1), p.131-136
Main Authors: Kelson, I, Levy, Y, Racah, D, Redmard, E, Beaudoin, M, Pinnington, T, Tiedje, T, Giesen, U
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/30/1/016