Thickness uniformity of gas-phase coatings in narrow channels: II. One-side confined channels

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2002-11, Vol.35 (21), p.2723-2730
Main Authors: Tolstopyatov, E M, Yang, S H, Kim, M C
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Vapor phase epitaxy
growth from vapor phase
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/35/21/306