Discharge characteristics of an atmospheric pressure radio-frequency plasma jet

An atmospheric pressure plasma jet using radio-frequency (rf) (13.56 MHz) power is developed to produce a homogeneous glow discharge at low temperatures (between 50 deg C and 150 deg C on the inner electrode). Discharge parameters (power, voltage, current and the phase angle) are measured and the in...

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2005-05, Vol.38 (9), p.1396-1401
Main Authors: Zhu, Wen-Chao, Wang, Bai-Rong, Yao, Zong-Xi, Pu, Yi-Kang
Format: Article
Language:English
Subjects:
Electric discharges
Exact sciences and technology
High-frequency discharges
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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Summary:An atmospheric pressure plasma jet using radio-frequency (rf) (13.56 MHz) power is developed to produce a homogeneous glow discharge at low temperatures (between 50 deg C and 150 deg C on the inner electrode). Discharge parameters (power, voltage, current and the phase angle) are measured and the influence of the operating parameters on the discharge characteristics is investigated for a He/O2 gas mixture. By varying the input power, a 'phase saturation'region and the 'arc failure' mode are identified. The optimized flow rate ratio between oxygen and helium is found to be 0.1/40 slpm in our experiment. At this ratio, a low power consumption and wide operational range for rf power (200 W) are obtained.
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/38/9/011