Absolute atomic oxygen density distributions in the effluent of a microscale atmospheric pressure plasma jet

The coplanar microscale atmospheric pressure plasma jet (mu-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, ~15 W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixtur...

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2008-10, Vol.41 (19), p.194006-194006 (6)
Main Authors: Knake, N, Reuter, S, Niemi, K, Schulz-von der Gathen, V, Winter, J
Format: Article
Language:English
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Summary:The coplanar microscale atmospheric pressure plasma jet (mu-APPJ) is a capacitively coupled radio frequency discharge (13.56 MHz, ~15 W rf power) designed for optimized optical diagnostic access. It is operated in a homogeneous glow mode with a noble gas flow (1.4 slm He) containing a small admixture of molecular oxygen (~0.5%). Ground state atomic oxygen densities in the effluent up to 2 X 1014 cm-3 are measured by two-photon absorption laser-induced fluorescence spectroscopy (TALIF) providing space resolved density maps. The quantitative calibration of the TALIF setup is performed by comparative measurements with xenon. A maximum of the atomic oxygen density is observed for 0.6% molecular oxygen admixture. Furthermore, an increase in the rf power up to about 15 W (depending on gas flow and mixture) leads to an increase in the effluent's atomic oxygen density, then reaching a constant level for higher powers.
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/41/19/194006