Elaboration of a wide range of TiO 2 micro/nanostructures by high power impulse inverted cylindrical magnetron sputtering

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2014-05, Vol.47 (19), p.195201
Main Authors: Lecoq, Elodie, Guillot, Jérôme, Duday, David, Chemin, Jean-Baptiste, Choquet, Patrick
Format: Article
Language:English
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/47/19/195201