Computational study of the CF 4  /CHF 3  / H 2  /Cl 2  /O 2  /HBr gas phase plasma chemistry

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2016-05, Vol.49 (19), p.195203
Main Authors: Tinck, Stefan, Bogaerts, Annemie
Format: Article
Language:English
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/49/19/195203