Sputtering of tungsten by N + and N 2 + ions: investigations of molecular effects

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Bibliographic Details
Published in:Physica scripta 2011-12, Vol.T145, p.14017
Main Authors: Dobes, K, Naderer, P, Lachaud, N, Eisenmenger-Sittner, C, Aumayr, F
Format: Article
Language:English
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ISSN:0031-8949
1402-4896
DOI:10.1088/0031-8949/2011/T145/014017