Resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification

In this paper a simple theoretical analysis together with an experimental verification of the analysis that provides an estimation of the resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification is presented. The reso...

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Bibliographic Details
Published in:Physica scripta 2014-09, Vol.T162 (1), p.14052
Main Authors: Manojlovi, L M, ivanov, M B, Slankamenac, M P, Stupar, D Z, Baji, J S
Format: Article
Language:English
Subjects:
absolute position measurement
fiber-optic sensor
resolution limit
white-light interferometry
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Summary:In this paper a simple theoretical analysis together with an experimental verification of the analysis that provides an estimation of the resolution limit of the white-light interferometric sensor for absolute position measurement based on central fringe maximum identification is presented. The resolution better than 10 pm is obtained in the white-light interferometric sensing system where the signal-to-noise ratio was greater than 80 dB.
ISSN:0031-8949
1402-4896
DOI:10.1088/0031-8949/2014/T162/014052