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Optical and Electrical Properties of a-Si:H prepared by Reactive Sputtering

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Bibliographic Details
Published in:Physica scripta 1984-04, Vol.29 (4), p.372-377
Main Authors: Gyllenberg-Gästrin, U, Kuivalainen, P, Leppihalme, M, Isotalo, H
Format: Article
Language:English
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ISSN:1402-4896
0031-8949
1402-4896
DOI:10.1088/0031-8949/29/4/015