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Optical and Electrical Properties of a-Si:H prepared by Reactive Sputtering
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Published in: | Physica scripta 1984-04, Vol.29 (4), p.372-377 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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ISSN: | 1402-4896 0031-8949 1402-4896 |
DOI: | 10.1088/0031-8949/29/4/015 |