Three-Step Growth Optimization of AlN Epilayers by MOCVD

Saved in:
Bibliographic Details
Published in:Chinese physics letters 2008-06, Vol.25 (6), p.2265-2268
Main Authors: Ming-Zeng, Peng, Li-Wei, Guo, Jie, Zhang, Nai-Sen, Yu, Xue-Liang, Zhu, Jian-Feng, Yan, Bin-Hui, Ge, Hai-Qiang, Jia, Hong, Chen, Jun-Ming, Zhou
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/25/6/094