GISAXS and ATR-FTIR Studies on Stress-Induced Microstructure Evolution of a-Si:H under H 2 Plasma Exposure

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Bibliographic Details
Published in:Chinese physics letters 2012-10, Vol.29 (10), p.106801
Main Authors: Zuo, Ze-Wen, Cui, Guang-Lei, Wang, Yu, Wang, Jun-Zhuan, Pu, Lin, Shi, Yi
Format: Article
Language:English
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ISSN:0256-307X
1741-3540
DOI:10.1088/0256-307X/29/10/106801