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Nanolithography

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Bibliographic Details
Published in:	Semiconductor science and technology 1996-11, Vol.11 (11S), p.1552-1557
Main Authors:	Ferry, D K, Khoury, M, Jr, D P Pivin, Connolly, K M, Whidden, T K, Kozicki, M N, Allee, D R
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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