Effect of preoxidation treatment on the I - V and C - V characteristics of Si/SiO 2 /Al MIS diodes

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Bibliographic Details
Published in:Semiconductor science and technology 1999-06, Vol.14 (6), p.528-531
Main Authors: Majhi, J, Benny, E T Paul
Format: Article
Language:English
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/14/6/307