Sputter-deposited metal contacts for n-type GaN

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Bibliographic Details
Published in:Semiconductor science and technology 2004-02, Vol.19 (2), p.176-182
Main Authors: Hall, H P, Awaah, M A, Das, K
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Electrical properties of specific thin films
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Iii-v semiconductors
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Molecular, atomic, ion, and chemical beam epitaxy
Physics
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/19/2/009