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Recent progress in metal-organic chemical vapor deposition of $\left( 000\bar{1} \right)$ N-polar group-III nitrides
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Published in: | Semiconductor science and technology 2014-11, Vol.29 (11), p.113001 |
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Main Authors: | , , , , , , , , , , |
Format: | Article |
Language: | eng ; jpn |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0268-1242 1361-6641 |
DOI: | 10.1088/0268-1242/29/11/113001 |