Selective-area epitaxy and etching by chemical beam epitaxy

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Bibliographic Details
Published in:Semiconductor science and technology 1993-06, Vol.8 (6), p.1016-1022
Main Author: Tsang, W T
Format: Article
Language:English
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/8/6/008