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Hydrogen-related shallow thermal donors in Czochralski silicon

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Bibliographic Details
Published in:Semiconductor science and technology 1994-09, Vol.9 (9), p.1736-1739
Main Authors: McQuaid, S A, Newman, R C, Lightowlers, E C
Format: Article
Language:English
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ISSN:0268-1242
1361-6641
DOI:10.1088/0268-1242/9/9/027