Plasma-etched and sputtered GaAs(100) surfaces investigated by ellipsometry and Raman spectroscopy

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Bibliographic Details
Published in:Journal of physics. Condensed matter 1989-10, Vol.1 (SB), p.SB231-SB233
Main Authors: Rossow, U, Fieseler, T, Geurts, J, Zhan, D T R, Richter, W, Puttock, M S, Hilton, K P
Format: Article
Language:English
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ISSN:0953-8984
1361-648X
DOI:10.1088/0953-8984/1/SB/055