Accurate and traceable measurement of nano- and microstructures

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Bibliographic Details
Published in:Measurement science & technology 2006-03, Vol.17 (3), p.545-552
Main Authors: Dai, Gaoliang, Pohlenz, Frank, Xu, Min, Koenders, Ludger, Danzebrink, Hans-Ulrich, Wilkening, Günter
Format: Article
Language:English
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ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/17/3/S15