Measurement, characterization and volume determination of approximately spherical objects

The roundness and sphericity of manufactured single crystal silicon spheres of nearly perfect geometry have been measured using a high accuracy rotating probe instrument. Accurate 3D absolute radial data representing the surface of the object can be obtained by adjusting the sphericity data using ab...

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Bibliographic Details
Published in:Measurement science & technology 1994-09, Vol.5 (9), p.1048-1052
Main Authors: Giardini, W, Ha, J
Format: Article
Language:English
Subjects:
Exact sciences and technology
Measurements common to several branches of physics and astronomy
Metrology, measurements and laboratory procedures
Physics
Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements)
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Summary:The roundness and sphericity of manufactured single crystal silicon spheres of nearly perfect geometry have been measured using a high accuracy rotating probe instrument. Accurate 3D absolute radial data representing the surface of the object can be obtained by adjusting the sphericity data using absolute diameter measurements. The volume can then be calculated numerically from the absolute 3D radial measurement data by either direct numerical integration or spherical harmonics. (Original abstract-amended)
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/5/9/003