A method for determining the spring constant of cantilevers for atomic force microscopy

The spring constant of an atomic force microscope (AFM) cantilever is determined by using a large-scale cantilever that has been calibrated accurately. The spring constant of the AFM cantilever is determined precisely by measuring the deflections of both cantilevers simultaneously using heterodyne i...

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Bibliographic Details
Published in:Measurement science & technology 1996-02, Vol.7 (2), p.179-184
Main Authors: Torii, Akihiro, Sasaki, Minoru, Hane, Kazuhiro, Okuma, Shigeru
Format: Article
Language:English
Subjects:
Atomic force microscopes
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning probe microscopes, components and techniques
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Summary:The spring constant of an atomic force microscope (AFM) cantilever is determined by using a large-scale cantilever that has been calibrated accurately. The spring constant of the AFM cantilever is determined precisely by measuring the deflections of both cantilevers simultaneously using heterodyne interferometry. The slope of the force curve gives the spring constant of the AFM cantilever. (Abstract uses original text)
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/7/2/010