A miniature, all-electrostatic, field emission electron column for surface analytical microscopy

The design, construction and application of a two-lens field emission column for the Multispectral Auger Microscope are presented. The column can provide a finely focused beam of electrons with energies ranging from 100 eV to 15 keV, and corresponding beam currents of 5-20 nA, onto a sample at a wor...

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Bibliographic Details
Published in:Measurement science & technology 1997-05, Vol.8 (5), p.536-545
Main Authors: Roberts, R H, Gomati, M M El, Kudjoe, J, Barkshire, I R, Bean, S J, Prutton, M
Format: Article
Language:English
Subjects:
Electron, positron and ion microscopes, electron diffractometers and related techniques
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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Summary:The design, construction and application of a two-lens field emission column for the Multispectral Auger Microscope are presented. The column can provide a finely focused beam of electrons with energies ranging from 100 eV to 15 keV, and corresponding beam currents of 5-20 nA, onto a sample at a working distance of 10 mm. Edge resolution measurements show that the beam diameter at the sample is (at worst) 0.6 \#m\m at 200 eV falling to 120 nm at 5 keV. (Abstract quotes from original text)
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/8/5/012