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Bilayer reversal imprint lithography: direct metal–polymer transfer

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Bibliographic Details
Published in:Nanotechnology 2004-08, Vol.15 (8), p.1103-1107
Main Authors: Suh, Dongchul, Rhee, Jungsoo, Lee, Hong H
Format: Article
Language:English
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/15/8/040