Preparation of regularly structured nanotubular TiO 2 thin films on ITO and their modification with thin ALD-grown layers

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Bibliographic Details
Published in:Nanotechnology 2012-03, Vol.23 (12), p.125707
Main Authors: Tupala, Jere, Kemell, Marianna, Härkönen, Emma, Ritala, Mikko, Leskelä, Markku
Format: Article
Language:English
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/23/12/125707