Surface damage assessment of nanometre finish substrates using differential reflectance spectroscopy

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Bibliographic Details
Published in:Nanotechnology 1998-06, Vol.9 (2), p.54-60
Main Authors: Gordon-Smith, David, Lowe, David Henry
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials science
Optical instruments, equipment and techniques
Physics
Polishing
Surface treatments
Visible and ultraviolet spectrometers
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ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/9/2/003