Ion beam synthesis of polycrystalline SiC on SiO 2 structures for MEMS applications

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2000-06, Vol.10 (2), p.152-156
Main Authors: Serre, Christophe, Pérez-Rodríguez, Alejandro, Morante, Joan Ramón, Esteve, Jaume, Acero, María-Cruz, Kögler, Reinhard, Skorupa, Wolfgang
Format: Article
Language:English
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/10/2/309