Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2001-03, Vol.11 (2), p.133-139
Main Authors: Ghantasala, Muralidhar K, Hayes, Jason P, Harvey, Erol C, Sood, Dinesh K
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Lithography, masks and pattern transfer
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/11/2/308