A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures

We have developed a system for the measurement of the inner profile of high-aspect-ratio microstructures. This system uses silicon micro-probes with a sharp tip at their end and an integrated piezoresistive force sensor. The probes are 1 mm long with a cross-sectional area of 20 x 20 sq microns, whi...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2002-05, Vol.12 (3), p.280-285, Article 313
Main Authors: Lebrasseur, Eric, Pourciel, Jean-Bernard, Bourouina, Tarik, Masuzawa, Takahisa, Fujita, Hiroyuki
Format: Article
Language:English
Subjects:
Algorithms
Applied sciences
Computer control
Exact sciences and technology
Force measurement
Industrial metrology. Testing
Mechanical engineering. Machine design
Microstructure
Piezoelectric devices
Precision engineering, watch making
Probes
Silicon
Silicon sensors
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Summary:We have developed a system for the measurement of the inner profile of high-aspect-ratio microstructures. This system uses silicon micro-probes with a sharp tip at their end and an integrated piezoresistive force sensor. The probes are 1 mm long with a cross-sectional area of 20 x 20 sq microns, which allowed characterization of narrow and deep micro-holes having a radius as small as 40 microns. The measurement procedure utilizes an original algorithm, which prevents it from many unwanted phenomena. It is entirely automated by using a computer control. (Author)
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/12/3/313